Atmono, T. , Purniawan, A. , Fauzi, D.Z. , Sulistijono, S., Taufik, T., Wismogroho, A.S. , Putri, A. , Arum, S. , Santriaji, M.H. and Amal, M.I. 2026. Nanochemical hardening and wear resistance of multi-component Cr-Ni-Co-N thin films synthesized via reactive rf plasma sputtering. International Journal of Innovative Research and Scientific Studies. 9, 10 (Oct. 2026), 22–32. DOI:https://doi.org/10.53894/ijirss.v9i10.11958.